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In situ fast ellipsometric analysis of repetitive surface phenomena
Campmany i Guillot, Josep, 1966-; Costa i Balanzat, Josep; Canillas i Biosca, Adolf; Andújar Bella, José Luis; Bertrán Serra, Enric
Universitat de Barcelona
El·lipsometria
Pel·lícules fines
Buit
Ciència dels materials
Ellipsometry
Thin films
Vacuum
Materials science
(c) American Institute of Physics, 1997
Article
American Institute of Physics
         

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