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In situ spectroellipsometric study of the nucleation and growth of amorphous silicon
Canillas i Biosca, Adolf; Bertran Serra, Enric; Andújar Bella, José Luis; Drevillon, B.
Universitat de Barcelona
Silici
Semiconductors amorfs
El·lipsometria
Silicon
Amorphous semiconductors
Ellipsometry
(c) American Institute of Physics , 1990
Article
info:eu-repo/semantics/publishedVersion
American Institute of Physics
         

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