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Properties of amorphous silicon thin films grown in square wave modulated silane rf discharges.
Andújar Bella, José Luis; Bertran Serra, Enric; Canillas i Biosca, Adolf; Campmany i Guillot, Josep, 1966-; Serra-Miralles, J.; Roch i Cunill, Carles; Lloret, A.
Universitat de Barcelona
Semiconductors amorfs
Pel·lícules fines
Silici
Amorphous semiconductors
Thin films
Silicon
(c) American Institute of Physics , 1992
Article
info:eu-repo/semantics/publishedVersion
American Institute of Physics
         

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