Title: | Dielectric breakdown in ultra-thin Hf based gate stacks : a resistive switching phenomenon |
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Author: | Rodríguez Martínez, Rosana; Martin Martinez, Javier; Crespo-Yepes, Albert; Porti i Pujal, Marc; Nafría i Maqueda, Montserrat; Aymerich Humet, Xavier |
Abstract: | |
Subject(s): | -Dielectric breakdown (BD) -BD reversibility -High-k -Reliability -CMOS -Resistive switching -MOSFET |
Rights: | open access
Tots els drets reservats. https://rightsstatements.org/vocab/InC/1.0/ |
Document type: | Article |
Published by: | |
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Uri: | https://ddd.uab.cat/record/138448 |