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Use of information on the manufacture of samples for the optical characterization of multilayers through a global optimization
Sancho i Parramon, Jordi; Ferré Borrull, Josep; Bosch i Puig, Salvador; Ferrara, Maria Christina
Universitat de Barcelona
We present a procedure for the optical characterization of thin-film stacks from spectrophotometric data. The procedure overcomes the intrinsic limitations arising in the numerical determination of manyparameters from reflectance or transmittance spectra measurements. The key point is to use all theinformation available from the manufacturing process in a single global optimization process. The method is illustrated by a case study of solgel applications.
13-07-2012
Òptica electrònica
Electron optics
(c) Optical Society of America, 2003
Artículo
Optical Society of America
         

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