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Title: | Experiments on MEMS Integration in 0.25 turn CMOS Process |
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Author: | Michalik, Piotr Jozef; Fernández, Daniel; Wietstruck, Mehmet; Kaynak, Mehmet; Madrenas Boadas, Jordi |
Other authors: | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. ISSET - Integrated Smart Sensors and Health Technologies |
Abstract: | |
Abstract: | |
Subject(s): | -Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica::Circuits integrats -Integrated circuits -CMOS-MEMS -CMOS -MEMS -BEOL (Back End of Line) -Accelerometer -Circuits integrats |
Rights: | Attribution-NonCommercial-NoDerivs 3.0 Spain
http://creativecommons.org/licenses/by-nc-nd/3.0/es/ |
Document type: | Article - Published version Article |
Published by: | Multidisciplinary Digital Publishing Institute (MDPI) |
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