Design and test of resonators using PiezoMUMPS technology

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To access the full text documents, please follow this link: http://hdl.handle.net/2117/120352

dc.contributor	Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.contributor	Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
dc.contributor.author	Pons Nin, Joan
dc.contributor.author	Gorreta Mariné, Sergio
dc.contributor.author	Domínguez Pumar, Manuel
dc.contributor.author	Blokhina, Elena
dc.contributor.author	O'Connell, D.
dc.contributor.author	Feely, Orla
dc.date	2015
dc.identifier.citation	Pons, J., Gorreta, S., Dominguez, M., Blokhina, E., O'Connell, D., Feely, O. Design and test of resonators using PiezoMUMPS technology. A: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. "2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2014): Cannes, France: 1-4 April 2014". Institute of Electrical and Electronics Engineers (IEEE), 2015, p. 1-4.
dc.identifier.citation	978-2-35500-028-7
dc.identifier.citation	10.1109/DTIP.2014.7056666
dc.identifier.uri	http://hdl.handle.net/2117/120352
dc.language.iso	eng
dc.publisher	Institute of Electrical and Electronics Engineers (IEEE)
dc.relation	https://ieeexplore.ieee.org/document/7056666/
dc.relation	info:eu-repo/grantAgreement/ES/1PE/TEC2013-48102-C2-1-P
dc.rights	info:eu-repo/semantics/openAccess
dc.subject	Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica::Circuits integrats
dc.subject	Integrated circuits
dc.subject	Piezo-MEMS
dc.subject	MEMS resonators
dc.subject	Mechanical modes
dc.subject	Circuits integrats
dc.title	Design and test of resonators using PiezoMUMPS technology
dc.type	info:eu-repo/semantics/submittedVersion
dc.type	info:eu-repo/semantics/conferenceObject
dc.description.abstract	© 2015 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes,creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
dc.description.abstract	This paper presents preliminary results obtained with devices fabricated with the new PiezoMUMPS process. Since these devices will be used as resonators in applications based on Pulsed Digital Oscillators, we analyze, both with simulations and measurements, the mechanical vibration modes that can be excited and detected. We also introduce a specific version of PDO for piezoelectric MEMS.
dc.description.abstract	Peer Reviewed

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