Título:
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Design and test of resonators using PiezoMUMPS technology
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Autor/a:
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Pons Nin, Joan; Gorreta Mariné, Sergio; Domínguez Pumar, Manuel; Blokhina, Elena; O'Connell, D.; Feely, Orla
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Otros autores:
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Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
Abstract:
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Abstract:
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This paper presents preliminary results obtained with devices fabricated with the new PiezoMUMPS process. Since these devices will be used as resonators in applications based on Pulsed Digital Oscillators, we analyze, both with simulations and measurements, the mechanical vibration modes that can be excited and detected. We also introduce a specific version of PDO for piezoelectric MEMS. |
Abstract:
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Peer Reviewed |
Materia(s):
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-Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica::Circuits integrats -Integrated circuits -Piezo-MEMS -MEMS resonators -Mechanical modes -Circuits integrats |
Derechos:
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Tipo de documento:
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Artículo - Versión presentada Objeto de conferencia |
Editor:
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Institute of Electrical and Electronics Engineers (IEEE)
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Compartir:
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