Para acceder a los documentos con el texto completo, por favor, siga el siguiente enlace:

Sigma-delta effects and charge locking in capacitive MEMS under dielectric charge control
Giounanlis, Panagiotis; Gorreta Mariné, Sergio; Domínguez Pumar, Manuel; Pons Nin, Joan; Feely, Orla; Blokhina, Elena
Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
©2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
This work investigates, analytically and experimentally, the effects induced by the use of a first-order sigma-delta (S¿) feedback loop as a control method of dielectric charging for capacitive microelectromechanical systems (MEMS). This technique allows setting of a desired level of net charge in the dielectric of a MEMS device by continuously alternating the polarity of the actuation voltage. This control system displays a number of interesting effects, inherited from S¿ modulation and not usually found in conventional MEMS applications, with the charge-locking phenomenon being the most relevant. The convergence time and the effectiveness of the control method are also investigated and discussed.
Peer Reviewed
Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica
Microelectromechanical systems
Electric discharges
Micromechanical devices
Charge carrier processes
Mathematical model
Discharges (electric)
Sistemes microelectromecànics
Descàrregues elèctriques

Mostrar el registro completo del ítem

Documentos relacionados

Otros documentos del mismo autor/a

Giounanlis, Panagiotis; Andrade Miceli, Dennis; Gorreta Mariné, Sergio; Pons Nin, Joan; Domínguez Pumar, Manuel; Blokhina, Elena
Domínguez Pumar, Manuel; Gorreta Mariné, Sergio; Pons Nin, Joan; Blokhina, Elena; Giounanlis, Panonios; Feely, Orla
Gorreta Mariné, Sergio; Ruiz Fernández, Daniel; Blokhina, Elena; Pons Nin, Joan; Jimenez Serres, Vicente; O'Connell, D.; Feely, Orla; Madrenas Boadas, Jordi; Domínguez Pumar, Manuel
Gorreta Mariné, Sergio; Pons Nin, Joan; Blokhina, Elena; Feely, Orla; Domínguez Pumar, Manuel
Giounanlis, Panonios; Blokhina, Elena; Feely, Orla; Domínguez Pumar, Manuel; Pons Nin, Joan; Gorreta Mariné, Sergio