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Modelling the electrostatic actuation of MEMS: state of the art 2005.
Costa Castelló, Ramon; Shkel, A.M.; Fargas Marquès, A.
Most of MEMS devices are actuated using electrostatic forces. Parallel or lateral plate actuators are the types commonly used. Nevertheless, electrostatic actuation has some limitations due to its non-linear nature. This work presents a methodic overview of the existing techniques applied to the Micro-Electro-Mechanical Systems (MEMS) electrostatic actuation modeling and their implications to the dynamic behavior of the electromechanical system.
Àrees temàtiques de la UPC::Informàtica::Automàtica i control
Attribution-NonCommercial-NoDerivs 2.5 Spain
Universitat Politècnica de Catalunya. Institut d'Organització i Control de Sistemes Industrials

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