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dc.contributor | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
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dc.contributor | Universitat Politècnica de Catalunya. AHA - Arquitectures Hardware Avançades |
dc.contributor.author | Banerji, Saoni |
dc.contributor.author | Fernández Martínez, Daniel |
dc.contributor.author | Madrenas Boadas, Jordi |
dc.date | 2017-08-30 |
dc.identifier.citation | Banerji, S., Fernández, D., Madrenas, J. Characterization of CMOS-MEMS resonant pressure sensors. "IEEE sensors journal", 30 Agost 2017, vol. 17, núm. 20, p. 6653-6661 |
dc.identifier.citation | 1530-437X |
dc.identifier.citation | 10.1109/JSEN.2017.2747140 |
dc.identifier.uri | http://hdl.handle.net/2117/107770 |
dc.language.iso | eng |
dc.relation | http://ieeexplore.ieee.org/document/8022865/ |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Àrees temàtiques de la UPC::Enginyeria electrònica::Instrumentació i mesura::Sensors i actuadors |
dc.subject | Sensors |
dc.subject | Temperature measuring instruments |
dc.subject | CMOS-MEMS resonator |
dc.subject | Knudsen number |
dc.subject | MEMS characterization |
dc.subject | Nonlinearity |
dc.subject | Pressure sensor |
dc.subject | Quality factor |
dc.subject | Statistical mismatch |
dc.subject | Sensors |
dc.subject | Termometria -- Aparells i instruments |
dc.title | Characterization of CMOS-MEMS resonant pressure sensors |
dc.type | info:eu-repo/semantics/submittedVersion |
dc.type | info:eu-repo/semantics/article |
dc.description.abstract | |
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