Título: | Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry |
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Autor/a: | Forsen, E.; Abadal Berini, Gabriel; Ghatnekar-Nilsson, S.; Teva Meroño, Jordi; Verd Martorell, Jaume; Sandberg, R.; Svendsen, W.; Pérez Murano, Francesc; Esteve, Jaume; Figueras Costa, Eduardo; Campabadal, Francesca; Montelius, L.; Barniol i Beumala, Núria; Boisen, A.; American Physical Society |
Abstract: | |
Materia(s): | -Metal insulator semiconductor structures -Optical resonators -Electrostatics -Adsorption -Vibration resonance -Capacitance -Frequency measurement -Laser resonators -Nanoelectromechanical systems -Nanofabrication |
Derechos: | open access
Tots els drets reservats. https://rightsstatements.org/vocab/InC/1.0/ |
Tipo de documento: | Article |
Editor: | |
Compartir: | |
Uri: | https://ddd.uab.cat/record/116326 |