Title:
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Integrated tunneling sensor for nanoelectromechanical systems
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Author:
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Sadewasser, Sascha; Abadal Berini, Gabriel; Barniol i Beumala, Núria; Dohn, S.; Boisen, A.; Fonseca Chácharo, Luis Antonio; Esteve, Jaume; American Physical Society
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Abstract:
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Transducers based on quantum mechanical tunneling provide an extremely sensitive sensor principle, especially for nanoelectromechanical systems. For proper operation a gap between the electrodes of below 1nm is essential, requiring the use of structures with a mobile electrode. At such small distances, attractive van der Waals and capillary forces become sizable, possibly resulting in snap-in of the electrodes. The authors present a comprehensive analysis and evaluation of the interplay between the involved forces and identify requirements for the design of tunnelingsensors. Based on this analysis, a tunnelingsensor is fabricated by Si micromachiningtechnology and its proper operation is demonstrated. |
Subject(s):
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-Tunneling -Electrodes -Nanoelectromechanical systems -Microelectromechanical systems -Electrostatics -Image sensors -Infrared detectors -Micromachining -Silicon detectors -Van der Waals forces |
Rights:
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open access
Tots els drets reservats.
https://rightsstatements.org/vocab/InC/1.0/ |
Document type:
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Article |
Published by:
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Share:
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Uri:
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https://ddd.uab.cat/record/116104
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