©2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.

With emerging medical, chemical, and biological applications of microwave-microfluidic devices, many researchers desire a fast and accurate calibration that can be achieved in a single connection. However, traditional on-wafer or coaxial calibrations require measurements of several different artifacts to the data prior to measuring the microwave-microfluidic device. Ideally, a single artifact would be able to present different impedance states to correct the vector network analyzer data, minimizing drift and eliminating artifact-to-artifact connection errors. Here, we developed a multistate single-connection calibration that used a coplanar waveguide loaded with a microfluidic channel. We then used measurements of the uncorrected scattering parameters of the coplanar waveguide with the channel empty, filled with deionized water, and filled with 30 w% (30 grams per liter) of saline to construct an eight-term error model and switch-term correction. After correction, the residuals between measured scattering parameters and with the literaturebased finite-element simulations were below -40 dB from 100 MHz to 110 GHz. This multistate single-connection calibration is compatible with both wafer-probed and connectorized microwave-microfluidic devices for accurate impedance spectroscopy and materials characterization without the need for multiple device measurements.

Peer Reviewed