Universitat de Barcelona
2016-11-04T11:37:04Z
2016-11-04T11:37:04Z
2015-09-11
Localized growth of SnO2 nanowires on top of CMOS compatible micromembranes that incorporate a buried heater and prepatterned interdigitated electrodes has been achieved that presents the advantage that it allows to easily and directly integrate the advantageous properties of quasi-one dimensional structures in an advanced electronic device by a Vapor Liquid Solid (VLS) mechanism. A NWs based sensor of this type is characterized as a low power gas sensor towards NH3 at different temperatures. Stable and reproducible response is obtained, that allows detecting concentrations below the time-weighted average exposure limit for 8 h.
Object of conference
Published version
English
Elsevier
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.proeng.2015.08.614
Reproducció del document publicat a: http://doi.org/10.1016/j.proeng.2015.08.614
Comunicació presentada a: Eurosensors 2015 Conference, XXIX edition. September 6 to 9, 2015. Freiburg, Germany. BS 07– Micro- / nanofabrication for MEMS II [BS07-2]
Procedia Engineering, 2015, vol. 120, p. 215-219
http://doi.org/10.1016/j.proeng.2015.08.614
info:eu-repo/grantAgreement/EC/FP7/336917/EU//BETTERSENSE
CC BY-NC-ND, (c) Samà et al., 2015
http://creativecommons.org/licenses/by-nc-nd/4.0/
