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dc.contributor | Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions |
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dc.contributor | Universitat Politècnica de Catalunya. CSC - Components and Systems for Communications Research Group |
dc.contributor.author | Johnson, W.L. |
dc.contributor.author | Wallis, T.M. |
dc.contributor.author | Kabos, P. |
dc.contributor.author | Rocas Cantenys, Eduard |
dc.contributor.author | Collado Gómez, Juan Carlos |
dc.contributor.author | Liew, L.A. |
dc.contributor.author | Ha, J.Y. |
dc.contributor.author | Davydov, A.V. |
dc.contributor.author | Plankis, A. |
dc.contributor.author | Heyliger, P.R. |
dc.date | 2012 |
dc.identifier.citation | Johnson, W., Wallis, T., Kabos, P., Rocas, E., Collado, J., Liew, L., Ha, J., Davydov, A., Plankis, A., Heyliger, P. A thickness-shear MEMS resonator employing electromechanical transduction through a coplanar waveguide. A: IEEE Frequency Control Symposium. "2012 IEEE International Frequency Control Symposium, IFCS 2012, Proceedings". 2012, p. 452-457. |
dc.identifier.citation | 978-145771819-9 |
dc.identifier.citation | 10.1109/FCS.2012.6243722 |
dc.identifier.uri | http://hdl.handle.net/2117/87190 |
dc.language.iso | eng |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Microelectromechanical systems |
dc.subject | Acoustic power |
dc.subject | Acoustic resonance |
dc.subject | Electromechanical transduction |
dc.subject | Fabricated device |
dc.subject | Finite-element |
dc.subject | High damping |
dc.subject | MEMS resonators |
dc.subject | Noise levels |
dc.subject | Non-Linearity |
dc.subject | Nulling |
dc.subject | Orders of magnitude |
dc.subject | Out-of-plane displacement |
dc.subject | Reference lines |
dc.subject | Shear displacement |
dc.subject | Silicon-bridge |
dc.subject | SOI wafers |
dc.subject | Swept-frequency |
dc.subject | Thermoelastic damping |
dc.subject | Thickness-shear |
dc.subject | Vibrational trapping |
dc.subject | Waveguide thickness |
dc.subject | Sistemes microelectromecànics |
dc.title | A thickness-shear MEMS resonator employing electromechanical transduction through a coplanar waveguide |
dc.type | info:eu-repo/semantics/publishedVersion |
dc.type | info:eu-repo/semantics/conferenceObject |
dc.description.abstract | |
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