Templated growth of tungsten oxide micro/nanostructures using aerosol assisted chemical vapour deposition

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Title:	Templated growth of tungsten oxide micro/nanostructures using aerosol assisted chemical vapour deposition
Author:	Blackman, Cs; Correig, X; Katko, V; Mozalev, A; Parkin, I P; Alcubilla González, Ramón; Todorov Trifonov, Trifon
Other authors:	Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
Abstract:	Porous anodized alumina (PAA) and macroporous silicon (MS) substrates have been used to template the growth of tungsten oxide via aerosol assisted chemical vapour deposition from the precursor tungsten hexaphenoxide. The results show that thin PAA substrates have potential as templates for growing microstructured tungsten oxide films and MS substrates cause the growth of ‘grids’ of polycrystalline tungsten oxide.
Abstract:	Peer Reviewed
Subject(s):	-Àrees temàtiques de la UPC::Enginyeria dels materials -Materials science -Chemical vapour deposition -Electron microscopy -Microstructure -Tungsten oxide -Ciència dels materials
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Document type:	Article - Published version Article
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