Characterization method of the dynamics of the trapped charge in contactless capacitive MEMS

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To access the full text documents, please follow this link: http://hdl.handle.net/2117/120172

dc.contributor	Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.contributor	Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
dc.contributor.author	Gorreta Mariné, Sergio
dc.contributor.author	Pons Nin, Joan
dc.contributor.author	Domínguez Pumar, Manuel
dc.contributor.author	Blokhina, Elena
dc.contributor.author	Feely, Orla
dc.date	2015
dc.identifier.citation	Gorreta, S., Pons, J., Dominguez, M., Blokhina, E., Feely, O. Characterization method of the dynamics of the trapped charge in contactless capacitive MEMS. A: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. "2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2014): Cannes, France: 1-4 April 2014". Institute of Electrical and Electronics Engineers (IEEE), 2015, p. 1-6.
dc.identifier.citation	978-2-35500-028-7
dc.identifier.citation	10.1109/DTIP.2014.7056667
dc.identifier.uri	http://hdl.handle.net/2117/120172
dc.language.iso	eng
dc.publisher	Institute of Electrical and Electronics Engineers (IEEE)
dc.relation	https://ieeexplore.ieee.org/abstract/document/7056667/
dc.rights	info:eu-repo/semantics/openAccess
dc.subject	Àrees temàtiques de la UPC::Enginyeria elèctrica
dc.subject	Dielèctrics
dc.subject	Microelectromechanical systems
dc.subject	Dielectrics
dc.subject	MEMS reliability
dc.subject	Dielectric charge dynamics
dc.subject	Sistemes microelectromecànics
dc.title	Characterization method of the dynamics of the trapped charge in contactless capacitive MEMS
dc.type	info:eu-repo/semantics/publishedVersion
dc.type	info:eu-repo/semantics/conferenceObject
dc.description.abstract	Dielectric charging of insulating films in microelectromechanical systems (MEMS) has a crucial effect on the operation of those devices. A new method is presented in order to characterize the dynamics of the charge trapped in the dielectric layer of MEMS devices. This allows knowing the state of the charge at each sampling time without distorting the measurement. This approach allows one to model the expected behaviour of the trapped charge inside the dielectric as a response to a sigma-delta control of charge. The goodness of the proposed approach is obtained by matching the experimentally obtained closed loop response with the one predicted by the model obtained using the proposed characterization method.
dc.description.abstract	Peer Reviewed

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