Optical properties of 3D macroporous silicon structures

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To access the full text documents, please follow this link: http://hdl.handle.net/2117/118026

dc.contributor	Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.contributor	Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
dc.contributor.author	Garin Escriva, Moises
dc.contributor.author	Todorov Trifonov, Trifon
dc.contributor.author	Rodríguez Martínez, Ángel
dc.contributor.author	Marsal Garví, Lluís Francesc
dc.contributor.author	Alcubilla González, Ramón
dc.date	2008-04-15
dc.identifier.citation	Garin, M., Trifonov, T., Rodriguez, A., Marsal, L. F., Alcubilla, R. Optical properties of 3D macroporous silicon structures. "Materials science and engineering B. Solid state materials for advanced tech", 15 Abril 2008, vol. 149, núm. 3, p. 275-280.
dc.identifier.citation	0921-5107
dc.identifier.citation	10.1016/j.mseb.2007.08.006
dc.identifier.uri	http://hdl.handle.net/2117/118026
dc.language.iso	eng
dc.relation	https://www.sciencedirect.com/science/article/pii/S092151070700445X
dc.rights	info:eu-repo/semantics/openAccess
dc.subject	Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Telecomunicació òptica::Fotònica
dc.subject	Àrees temàtiques de la UPC::Física::Física de l'estat sòlid::Semiconductors
dc.subject	Photonics
dc.subject	Silicon
dc.subject	Macroporous silicon
dc.subject	Three-dimensional structures
dc.subject	Photonic crystals
dc.subject	Electrochemical etching
dc.subject	Alkaline etching
dc.subject	Fotònica
dc.subject	Silici
dc.title	Optical properties of 3D macroporous silicon structures
dc.type	info:eu-repo/semantics/publishedVersion
dc.type	info:eu-repo/semantics/article
dc.description.abstract	We study the optical properties of three-dimensional (3D) microstructures fabricated by electrochemical etching of macroporous silicon with modulated pore diameter. Optical measurements along the pore axis reveal photonic band gaps which are also confirmed by calculations of photonic band dispersion. We investigate numerically and experimentally the evolution of these gaps as a function of pore diameter modulation. In addition, a subsequent anisotropic etching of macroporous silicon in alkaline solutions allows to achieve pores with new shapes of modulation. We compare the optical characteristics of 3D macroporous structures with and without such anisotropic treatment.
dc.description.abstract	Peer Reviewed

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