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dc.contributor | Universitat de Barcelona |
---|---|
dc.contributor.author | Gordiets, B. F. |
dc.contributor.author | Inestrosa Izurieta, María José |
dc.contributor.author | Navarro, A. |
dc.contributor.author | Bertran Serra, Enric |
dc.date | 2013-12-03T13:25:44Z |
dc.date | 2013-12-03T13:25:44Z |
dc.date | 2011 |
dc.date | 2013-12-03T13:25:44Z |
dc.identifier.citation | 0021-8979 |
dc.identifier.citation | 604019 |
dc.identifier.uri | http://hdl.handle.net/2445/48250 |
dc.format | 9 p. |
dc.format | application/pdf |
dc.language.iso | eng |
dc.publisher | American Institute of Physics |
dc.relation | Reproducció del document publicat a: http://dx.doi.org/10.1063/1.3658249 |
dc.relation | Journal of Applied Physics, 2011, vol. 110, p. 103302-1-103302-8 |
dc.relation | http://dx.doi.org/10.1063/1.3658249 |
dc.rights | (c) American Institute of Physics , 2011 |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Silici |
dc.subject | Nanopartícules |
dc.subject | Plasma (Gasos ionitzats) |
dc.subject | Polímers |
dc.subject | Pel·lícules fines |
dc.subject | Dissociació (Química) |
dc.subject | Silicon |
dc.subject | Nanoparticles |
dc.subject | Plasma (Ionized gases) |
dc.subject | Polymers |
dc.subject | Thin films |
dc.subject | Dissociation |
dc.title | Nanoparticles in SiH4-Ar plasma: Modelling and comparison with experimental data |
dc.type | info:eu-repo/semantics/article |
dc.type | info:eu-repo/semantics/publishedVersion |
dc.description.abstract |