Characterization of stratified media using high-resolution thin film measurement techniques

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Title:	Characterization of stratified media using high-resolution thin film measurement techniques
Author:	Aguerri Cavero, Alberto
Other authors:	Laguarta Bertran, Ferran
Abstract:	Tesina feta en col.laboració amb Sensofar-Tech, S.L.
Abstract:	The characterization of stratified media has become essential in the development of industrial applications such as LEDs, solar cells, medical devices, MEMs, MOEMS, etc. This characterization involves measuring the thickness and optical constants of thin layers with high lateral and vertical resolutions. For this purpose, we integrated a spectroscopic reflectometer into an existing 3D optical profiler. We also analyzed how the numerical aperture affects the thickness measurements.
Subject(s):	-Àrees temàtiques de la UPC::Enginyeria dels materials -3D optical profiler -Numerical aperture -Thin film -Stratified media -Semiconductors de pel·lícula fina
Rights:	Attribution-NonCommercial-NoDerivs 3.0 Spain http://creativecommons.org/licenses/by-nc-nd/3.0/es/
Document type:	Research/Master Thesis
Published by:	Universitat Politècnica de Catalunya
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