Title:
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Stress-Induced In Situ Modification of Transition Temperature in VO Films Capped by Chalcogenide
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Author:
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Sakai, Joe; Kuwahara, Masashi; Okimura, Kunio; Uehara, Yoichi
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Abstract:
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We attempted to modify the monoclinic-rutile structural phase transition temperature (T ) of a VO thin film in situ through stress caused by amorphous-crystalline phase change of a chalcogenide layer on it. VO films on C- or R-plane AlO substrates were capped by GeSbTe (GST) films by means of rf magnetron sputtering. T of the VO layer was evaluated through temperature-controlled measurements of optical reflection intensity and electrical resistance. Crystallization of the GST capping layer was accompanied by a significant drop in T of the VO layer underneath, either with or without a SiN diffusion barrier layer between the two. The shift of T was by ~30 °C for a GST/VO bilayered sample with thicknesses of 200/30 nm, and was by ~6 °C for a GST/SiN /VO trilayered sample of 200/10/6 nm. The lowering of T was most probably caused by the volume reduction in GST during the amorphous-crystalline phase change. The stress-induced in in situ modification of T in VO films could pave the way for the application of nonvolatile changes of optical properties in optoelectronic devices. |
Publication date:
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2022-10-31 |
Subject(s):
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-Vanadium oxide -Chalcogenide -Insulator-metal phase transition -Phase change material -Strain engineering |
Rights:
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open access
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https://creativecommons.org/licenses/by/4.0/ |
Document type:
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Article |
Published by:
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Share:
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Uri:
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https://ddd.uab.cat/record/253172
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