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dc.contributor | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
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dc.contributor | Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
dc.contributor.author | Todorov Trifonov, Trifon |
dc.contributor.author | Rodríguez Martínez, Ángel |
dc.contributor.author | Marsal, L F |
dc.contributor.author | Pallares, J |
dc.contributor.author | Alcubilla González, Ramón |
dc.date | 2008-02 |
dc.identifier.citation | Trifonov, T., Rodriguez, A., Marsal, L., Pallares, J., Alcubilla, R. Macroporous silicon: a versatile material for 3D structure fabrication. "Sensors and actuators A. Physical", Febrer 2008, vol. 141, núm. 2, p. 662-669. |
dc.identifier.citation | 0924-4247 |
dc.identifier.citation | 10.1016/j.sna.2007.09.001 |
dc.identifier.uri | http://hdl.handle.net/2117/118024 |
dc.language.iso | eng |
dc.relation | http://www.sciencedirect.com/science/article/pii/S092442470700670X |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Àrees temàtiques de la UPC::Física::Física de l'estat sòlid::Semiconductors |
dc.subject | Silicon |
dc.subject | Macroporous silicon |
dc.subject | Electrochemical etching |
dc.subject | Three-dimensional structures |
dc.subject | Photonic crystals |
dc.subject | Silicon micromachining |
dc.subject | Silici |
dc.title | Macroporous silicon: a versatile material for 3D structure fabrication |
dc.type | info:eu-repo/semantics/publishedVersion |
dc.type | info:eu-repo/semantics/article |
dc.description.abstract | |
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