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dc.contributor | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
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dc.contributor | Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
dc.contributor.author | Vega Bru, Didac |
dc.contributor.author | Rodríguez Martínez, Ángel |
dc.date | 2017-06 |
dc.identifier.citation | Vega, D., Rodriguez, A. Macroporous silicon. Technology and applications. A: "New research on silicon - Structure, properties, technology". InTech - Open science/Open minds, 2017, p. 155-182. |
dc.identifier.citation | 978-953-51-3160-1 |
dc.identifier.citation | 10.5772/67698 |
dc.identifier.uri | http://hdl.handle.net/2117/106525 |
dc.language.iso | eng |
dc.publisher | InTech - Open science/Open minds |
dc.relation | https://www.intechopen.com/books/new-research-on-silicon-structure-properties-technology |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Telecomunicació òptica::Fotònica |
dc.subject | Silicon |
dc.subject | Cristalls fotònics |
dc.subject | Macroporous silicon |
dc.subject | Electrochemical etching |
dc.subject | Field effect transistors |
dc.subject | Supercapacitors |
dc.subject | Microneedles |
dc.subject | MEMS |
dc.subject | Silici |
dc.subject | Photonic crystals |
dc.title | Macroporous silicon. Technology and applications |
dc.type | info:eu-repo/semantics/publishedVersion |
dc.type | info:eu-repo/semantics/bookPart |
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