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dc.contributor | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
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dc.contributor | Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
dc.contributor.author | Giounanlis, Panonios |
dc.contributor.author | Blokhina, Elena |
dc.contributor.author | Feely, Orla |
dc.contributor.author | Domínguez Pumar, Manuel |
dc.contributor.author | Pons Nin, Joan |
dc.contributor.author | Gorreta Mariné, Sergio |
dc.date | 2013 |
dc.identifier.citation | Giounanlis, P. [et al.]. Modelling of a charge control method for capacitive MEMS. A: European Conference on Circuit Theory and Design. "2013 European Conference on Circuit Theory and Design (ECCTD 2013): 8-12 September 2013: Dresden, Germany". Dresden: Institute of Electrical and Electronics Engineers (IEEE), 2013, p. 1-4. |
dc.identifier.citation | 9781479928576 |
dc.identifier.citation | 10.1109/ECCTD.2013.6662324 |
dc.identifier.uri | http://hdl.handle.net/2117/22152 |
dc.language.iso | eng |
dc.publisher | Institute of Electrical and Electronics Engineers (IEEE) |
dc.relation | http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6662324&tag=1 |
dc.rights | Attribution-NonCommercial-NoDerivs 3.0 Spain |
dc.rights | info:eu-repo/semantics/openAccess |
dc.rights | http://creativecommons.org/licenses/by-nc-nd/3.0/es/ |
dc.subject | Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica::Circuits integrats |
dc.subject | Integrated circuits |
dc.subject | Micromechanics |
dc.subject | MEMS control |
dc.subject | Dielectric charging |
dc.subject | MEMS reliability |
dc.subject | Circuits integrats |
dc.subject | Micromecànica |
dc.title | Modelling of a charge control method for capacitive MEMS |
dc.type | info:eu-repo/semantics/publishedVersion |
dc.type | info:eu-repo/semantics/conferenceObject |
dc.description.abstract | |
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