Silicon micromachined lens antenna for THz integrated heterodyne arrays

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dc.contributor	Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions
dc.contributor	Universitat Politècnica de Catalunya. ANTENNALAB - Grup d'Antenes i Sistemes Radio
dc.contributor.author	Llombart Juan, Nuria
dc.contributor.author	Lee, Choonsup
dc.contributor.author	Alonso del Pino, María
dc.contributor.author	Chattopadhyay, Goutam
dc.contributor.author	Jung Kubiak, Cecile
dc.contributor.author	Jofre Roca, Lluís
dc.contributor.author	Mehdi, Imran
dc.date	2013-09
dc.identifier.citation	Llombart, N. [et al.]. Silicon micromachined lens antenna for THz integrated heterodyne arrays. "IEEE Transactions on Terahertz Science and Technology", Setembre 2013, vol. 3, núm. 5, p. 515-523.
dc.identifier.citation	2156-342X
dc.identifier.citation	10.1109/TTHZ.2013.2270300
dc.identifier.uri	http://hdl.handle.net/2117/21678
dc.language.iso	eng
dc.publisher	Institute of Electrical and Electronics Engineers (IEEE)
dc.relation	http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6558872
dc.rights	info:eu-repo/semantics/openAccess
dc.subject	Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Antenes i agrupacions d'antenes
dc.subject	Antennas (Electronics)
dc.subject	Photolithography
dc.subject	Terahertz technology
dc.subject	Leaky wave antennas
dc.subject	Lens
dc.subject	Silicon fabrication
dc.subject	Terahertz (THz)
dc.subject	Antenes (Electrònica)
dc.subject	Fotolitografia
dc.title	Silicon micromachined lens antenna for THz integrated heterodyne arrays
dc.type	info:eu-repo/semantics/publishedVersion
dc.type	info:eu-repo/semantics/article
dc.description.abstract	In this paper, we present the design, fabrication, and measurements of a lens THz antenna that can be fabricated using conventional photolithography and deep reactive etching processes. The antenna is composed of an extended hemispherical silicon lens and a leaky wave waveguide feed. Both elements are fabricated using silicon micromachining techniques, enabling the fabrication of future large antenna arrays with a parallel process. To show the concept, a first antenna prototype has been fabricated using this fabrication process. Measurements obtained at 550 GHz are presented.
dc.description.abstract	Peer Reviewed

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