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dc.contributor | Universitat de Barcelona |
---|---|
dc.contributor.author | Andújar Bella, José Luis |
dc.contributor.author | Bertrán Serra, Enric |
dc.contributor.author | Manniete, Y. |
dc.date | 2012-10-09T09:48:57Z |
dc.date | 2012-10-09T09:48:57Z |
dc.date | 1996 |
dc.date | 2012-10-09T09:48:57Z |
dc.identifier.citation | 0021-8979 |
dc.identifier.citation | 112106 |
dc.identifier.uri | http://hdl.handle.net/2445/32239 |
dc.format | 3 p. |
dc.format | application/pdf |
dc.language.iso | eng |
dc.publisher | American Institute of Physics |
dc.relation | Reproducció del document publicat a: http://dx.doi.org/10.1063/1.363677 |
dc.relation | Journal of Applied Physics, 1996, vol. 80, num. 10, p. 6553-6555 |
dc.relation | http://dx.doi.org/10.1063/1.363677 |
dc.rights | (c) American Institute of Physics , 1996 |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Superfícies (Tecnologia) |
dc.subject | Pel·lícules fines |
dc.subject | Materials nanoestructurals |
dc.subject | Nitrur de bor |
dc.subject | Surfaces (Technology |
dc.subject | Thin films |
dc.subject | Nanostructured materials |
dc.subject | Boron nitride |
dc.title | Microstructure of highly oriented, hexagonal, boron nitride thin films grown on crystalline silicon by radio frequency plasma-assisted chemical vapor deposition |
dc.type | info:eu-repo/semantics/article |
dc.type | info:eu-repo/semantics/publishedVersion |
dc.description.abstract |