Procedure to characterize microroughness of optical thin films: application to ion-beam-sputtered vacuum-ultraviolet coatings

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RECERCAT Home > Universitat de Barcelona > Física Aplicada > Articles publicats en revistes (Física Aplicada) > View document

To access the full text documents, please follow this link: http://hdl.handle.net/2445/24308

dc.contributor	Universitat de Barcelona
dc.contributor.author	Ferré Borrul, Josep
dc.contributor.author	Duparré, Angela
dc.contributor.author	Quesnel, Etienne
dc.date	2012-04-23T07:06:15Z
dc.date	2012-04-23T07:06:15Z
dc.date	2001
dc.identifier.citation	0003-6935
dc.identifier.citation	194023
dc.identifier.uri	http://hdl.handle.net/2445/24308
dc.format	10 p.
dc.format	application/pdf
dc.language.iso	eng
dc.publisher	Optical Society of America
dc.relation	Reproducció del document publicat a: http://dx.doi.org/10.1364/AO.40.002190
dc.relation	Applied Optics, 2001, vol. 40, núm. 13, p. 2190-2199
dc.relation	http://dx.doi.org/10.1364/AO.40.002190
dc.rights	(c) Optical Society of America, 2001
dc.rights	info:eu-repo/semantics/openAccess
dc.subject	Òptica electrònica
dc.subject	Electron optics
dc.title	Procedure to characterize microroughness of optical thin films: application to ion-beam-sputtered vacuum-ultraviolet coatings
dc.type	info:eu-repo/semantics/article
dc.type	info:eu-repo/semantics/publishedVersion
dc.description.abstract	A method for characterizing the microroughness of samples in optical coating technology is developed. Measurements over different spatial-frequency ranges are composed into a single power spectral density (PSD) covering a large bandwidth. This is followed by the extraction of characteristic parameters through fitting of the PSD to a suitable combination of theoretical models. The method allows us to combine microroughness measurements performed with different techniques, and the fitting procedure can be adapted to any behavior of a combined PSD. The method has been applied to a set of ion-beam-sputtered fluoride vacuum-UV coatings with increasing number of alternative low- and high-index layers. Conclusions about roughness development and microstructural growth are drawn.

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