Zeolite-coated interdigital capacitors for humidity sensing

All of RECERCAT

To access the full text documents, please follow this link: http://hdl.handle.net/2117/13692

Title:	Zeolite-coated interdigital capacitors for humidity sensing
Author:	Urbiztondo, M.; Pellejero, I.; Rodríguez Martínez, Ángel; Pina Iritia, María Pilar; Santamaría Ramiro, Jesús Marcos
Other authors:	Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
Abstract:	Inter-digital capacitors (IDCs) with electrode gaps of 10 or 50 microns have been coated with zeolite films consisting of different zeolites with Si/Al ratios ranging from 1.5 (zeolite A) to infinite (silicalite). The performance of the sensor in the measurement of humidity has been related to the electrical properties of the zeolites (relative permittivity, ɛr), which in turn is a function of their Si/Al ratio. With zeolites of a high Al content the limit of detection was under 0.5 ppmV.
Abstract:	Peer Reviewed
Subject(s):	-Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques -Zeolites -Zeolites
Rights:
Document type:	Article - Published version Article
Share: