Microelectromechanical resonators based on an all polymer/carbon nanotube composite structural material

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To access the full text documents, please follow this link: http://hdl.handle.net/2117/13221

dc.contributor.author	Sousa, P.M.
dc.contributor.author	Gutierrez, M.
dc.contributor.author	Mendoza Gómez, Ernesto
dc.contributor.author	Llobera, A.
dc.contributor.author	Chu, V.
dc.contributor.author	Conde, J.P.
dc.date	2011-07-25
dc.identifier.citation	Sousa, P. [et al.]. Microelectromechanical resonators based on an all polymer/carbon nanotube composite structural material. "Applied physics letters", 25 Juliol 2011, vol. 99, núm. 4, p. 1-3.
dc.identifier.citation	0003-6951
dc.identifier.citation	10.1063/1.3621861
dc.identifier.uri	http://hdl.handle.net/2117/13221
dc.language.iso	eng
dc.relation	http://apl.aip.org/resource/1/applab/v99/i4/p044104_s1
dc.rights	info:eu-repo/semantics/openAccess
dc.subject	Àrees temàtiques de la UPC::Física
dc.subject	Microelectromechanical systems
dc.subject	MEMS
dc.subject	Carbon nanotube
dc.subject	Sistemes microelectromecànics
dc.subject	Nanotubs
dc.title	Microelectromechanical resonators based on an all polymer/carbon nanotube composite structural material
dc.type	info:eu-repo/semantics/publishedVersion
dc.type	info:eu-repo/semantics/article
dc.description.abstract	Carboxylated multi-wall carbon-nanotubes (CNTs) monolayers are integrated on microfabricated all-polymer micro-electromechanical systems (pMEMS) resonator bridges on glass substrates. The structural layer of the MEMS bridges is a multilayer blended conductive polymer based on poly(3,4-ethylenedioxythiophene):poly (styrenesulfonate) (PEDOT:PSS) to which functionalized CNT monolayers are electrostatically attached. The resonance frequency (fres) of electrostatically actuated pMEMS bridges was measured as a function of their length (32–67 lm) for different multilayer compositions. A significant increase in fres and quality factor (Q) with the addition of CNT monolayers to the PEDOT:PSS structural material is observed, demonstrating that CNT monolayers can be used to modulate pMEMS resonator properties.
dc.description.abstract	Peer Reviewed

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