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dc.contributor | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
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dc.contributor | Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
dc.contributor.author | Ferré Tomas, Rafel |
dc.contributor.author | Martín García, Isidro |
dc.contributor.author | Vetter, Michael |
dc.contributor.author | Garin Escriva, Moises |
dc.contributor.author | Alcubilla González, Ramón |
dc.date | 2005-07-07 |
dc.identifier.citation | Ferre, R.; Martín, I.; Vetter, M.; Garín, M.; Alcubilla, R. Effect of amorphous silicon carbide layer thickness on the passivation quality of crystalline silicon surface. A: Applied Physics Letters, 2005, VOL. 87, 202109. |
dc.identifier.citation | 0003-6951 |
dc.identifier.citation | 10.1063/1.2130530 |
dc.identifier.uri | http://hdl.handle.net/2117/2439 |
dc.language.iso | eng |
dc.publisher | American Institute of Physics |
dc.relation | TIC2002-04184-C02 |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica |
dc.subject | Silicon |
dc.subject | Microelectronics |
dc.subject | Amorphous film |
dc.subject | Amorphous semiconductors |
dc.subject | Crystalline surface |
dc.subject | Elemental semiconductors |
dc.subject | Fixed charge density |
dc.subject | Forming gas annealing |
dc.subject | Fundamental hole recombination |
dc.subject | Passivation |
dc.subject | Hydrogenated film |
dc.subject | Interface dangling bond |
dc.subject | Layer thickness |
dc.subject | p-type Crystalline wafer |
dc.subject | Saturation |
dc.subject | Semiconductor thin films |
dc.subject | Silicon compounds |
dc.subject | Surface passivation |
dc.subject | Wide band gap semiconductors |
dc.subject | Microelectrònica |
dc.subject | Silici |
dc.title | Effect of amorphous silicon carbide layer thickness on the passivation quality of crystalline silicon surface |
dc.type | info:eu-repo/semantics/article |
dc.description.abstract |