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dc.contributor | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
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dc.contributor | Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
dc.contributor.author | Molinero Giles, David |
dc.contributor.author | Castañer Muñoz, Luis María |
dc.date | 2007-07-12 |
dc.identifier.citation | Molinero, D.; Castañer, L. Comparison of air gap breakdown and substrate injection as mechanisms to induce dielectric charching in microelectromechanical switches. A: Applied Physics Letters, 2008, vol. 92, 043502. |
dc.identifier.citation | 0003-6951 |
dc.identifier.citation | 10.1663/1.2837615 |
dc.identifier.uri | http://hdl.handle.net/2117/2442 |
dc.language.iso | eng |
dc.publisher | American Institute of Physics |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica |
dc.subject | Microelectromechanical systems. |
dc.subject | Breakdown (Electricity) |
dc.subject | Air gap breakdown |
dc.subject | Dielectric charging |
dc.subject | Dielectric layer |
dc.subject | Dielectric thin films |
dc.subject | Electric breakdown |
dc.subject | Electrical stress |
dc.subject | Microelectromechanical switches |
dc.subject | Reliability |
dc.subject | Substrate carrier conduction |
dc.subject | Substrate injection |
dc.subject | MEMS |
dc.subject | Sistemes microelectromecànics |
dc.title | Comparison of air gap breakdown and substrate injection as mechanisms to induce dielectric charching in microelectromechanical switches |
dc.type | info:eu-repo/semantics/article |
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