Title:
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A low-power-consumption out-of-Plane electrothermal actuator
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Author:
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Girbau Sala, David; Llamas Morote, Marco Antonio; Casals Terré, Jasmina; Simó Selvas, Francisco Javier; Pradell i Cara, Lluís; Lázaro Guillén, Antoni
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Other authors:
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Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions; Universitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones |
Abstract:
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This paper proposes a new vertical electrothermal actuator. It can be considered as a hybrid between the traditional in-plane buckle-beam actuator and the vertical hot-cold actuator. It is here referred to as vertical buckle beam. At identical dimensional and bias conditions, it features a displacement larger than that of other vertical electrothermal actuators proposed so far in the literature. The actuator performance is demonstrated by means of an analytical model along with finite-element analysis. It is applied as a driving element in parallel-plate capacitors, where it is validated and its advantages in terms of power consumption are demonstrated empirically. |
Abstract:
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Peer Reviewed |
Subject(s):
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-Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques -Microelectromechanical systems -Capacitors -Capacitors -Finite element analysis -Low-power electronics -Microactuators -MEMS -parallel-plate capacitors -Finite-element analysis -Vertical hot-cold actuator -In-plane buckle-beam actuator -Electrothermal actuator -Low-power-consumption -Microelectromechanical systems |
Rights:
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Document type:
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Article |
Published by:
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IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
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