Nano particles in SiH4-Ar plasma: Modelling and comparison with experimental data

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dc.contributor	Universitat Politècnica de Catalunya. Departament d'Enginyeria Química
dc.contributor	Universitat Politècnica de Catalunya. SPPT - Superfícies, Productes i Processos Tèxtils
dc.contributor.author	Gordiets, F.B.
dc.contributor.author	Inestrosa-Izurieta, M.J.
dc.contributor.author	Navarro Sentanyes, Antonio
dc.contributor.author	Bertran, Enric
dc.date	2011-11-24
dc.identifier.citation	Gordiets, F. [et al.]. Nano particles in SiH4-Ar plasma: Modelling and comparison with experimental data. "Journal of applied physics", 24 Novembre 2011, vol. 110, núm. 103302, p. 1-8.
dc.identifier.citation	0021-8979
dc.identifier.citation	10.1063/1.3658249
dc.identifier.uri	http://hdl.handle.net/2117/15643
dc.language.iso	eng
dc.publisher	American Institute of Physics (AIP)
dc.publisher	Published by American Institute of Physics
dc.rights	Attribution-NonCommercial-NoDerivs 3.0 Spain
dc.rights	info:eu-repo/semantics/openAccess
dc.rights	http://creativecommons.org/licenses/by-nc-nd/3.0/es/
dc.source	Citation: J. Appl. Phys. 110, 103302 (2011); doi:10.1063/1.3658249
dc.subject	Àrees temàtiques de la UPC::Física
dc.subject	Nanoparticles
dc.subject	Nanotechnology
dc.subject	Thin films
dc.subject	Plasma chemistry
dc.subject	Nanopartícules
dc.subject	Nanotecnologia
dc.subject	Pel·lícules fines
dc.subject	Plasma
dc.title	Nano particles in SiH4-Ar plasma: Modelling and comparison with experimental data
dc.type	info:eu-repo/semantics/publishedVersion
dc.type	info:eu-repo/semantics/article