Title:
|
Laser-fired contact optimization in c-Si solar cells
|
Author:
|
Alcubilla González, Ramón; Ortega Villasclaras, Pablo Rafael; Orpella García, Alberto; Martín García, Isidro; Colina, M.; López Rodríguez, Gema; Voz Sánchez, Cristóbal; Sánchez, Isabel; Molpeceres, Carlos
|
Other authors:
|
Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
Abstract:
|
In this work we study the optimization of laser-fired contact (LFC) processing parameters, namely laser power and number of pulses, based on the electrical resistance measurement of an aluminum single LFC point. LFC process has been made through four passivation layers that are typically used in c-Si and mc-Si solar cell fabrication: thermally grown silicon oxide (SiO2), deposited phosphorus-doped amorphous silicon carbide (a-SiCx/H(n)), aluminum oxide (Al2O3) and silicon nitride (SiNx/H) films. Values for the LFC resistance normalized by the laser spot area in the range of 0.65–3 mΩ cm2 have been obtained. |
Abstract:
|
Peer Reviewed |
Subject(s):
|
-Àrees temàtiques de la UPC::Energies::Energia solar fotovoltaica -Solar cells -Photovoltaic effect -Energia solar -Cèl·lules solars |
Rights:
|
|
Document type:
|
Article - Published version Article |
Share:
|
|