Title:
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Phase-modulated ellipsometer using a Fourier transform infrared spectrometer for real time applications
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Author:
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Canillas i Biosca, Adolf; Pascual Miralles, Esther; Drévillon, B.
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Other authors:
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Universitat de Barcelona |
Abstract:
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A new Fourier transform infrared phase‐modulated ellipsometer is presented. It combines the high frequency provided by a photoelastic modulator (37 kHz) with the low frequency of the Fourier transform infrared spectroscopy (<1 kHz), by means of a numerical data acquisition system. A full spectrum recording (from 900 to 4000 cm−1) can be achieved in 2 s. Thus, it allows its adaptation for kinetic in situ studies. The optical setup and the data reduction procedure are presented. In particular, a self‐consistent spectral calibration procedure is described in detail. The precision in Ψ and Δ increases from 0.3° to 0.02° when increasing the integration time from 2 to 760 s. The examples shown in this article illustrate the high sensitivity to identify and analyze the absorption vibration variations of ultrathin films (a few angstroms thick). |
Subject(s):
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-El·lipsometria -Fourier transformations -Espectroscòpia infraroja -Pel·lícules fines -Ellipsometry -Fourier transformations -Infrared spectroscopy -Thin films |
Rights:
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(c) American Institute of Physics, 1993
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Document type:
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Article Article - Published version |
Published by:
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American Institute of Physics
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