Quantitative x-ray photoelectron spectroscopy study of Al/AlOx bilayers

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RECERCAT Home > Universitat de Barcelona > Física de la Matèria Condensada > Articles publicats en revistes (Física de la Matèria Condensada) > View document

To access the full text documents, please follow this link: http://hdl.handle.net/2445/22090

dc.contributor	Universitat de Barcelona
dc.contributor.author	Batlle Gelabert, Xavier
dc.contributor.author	Hattink, Bart Jan
dc.contributor.author	Labarta, Amílcar
dc.contributor.author	Åkerman, Johan J.
dc.contributor.author	Escudero, Roberto
dc.contributor.author	Schuller, Ivan K.
dc.date	2012-02-16T08:49:37Z
dc.date	2012-02-16T08:49:37Z
dc.date	2002
dc.identifier.citation	0021-8979
dc.identifier.citation	196861
dc.identifier.uri	http://hdl.handle.net/2445/22090
dc.format	6 p.
dc.format	application/pdf
dc.language.iso	eng
dc.publisher	American Institute of Physics
dc.relation	Reproducció del document publicat a: http://dx.doi.org/10.1063/1.1478791
dc.relation	Journal of Applied Physics, 2002, vol. 91, núm. 12, p. 10163-10168
dc.relation	http://dx.doi.org/10.1063/1.1478791
dc.rights	X-ray spectroscopy
dc.rights	(c) American Institute of Physics, 2002
dc.rights	info:eu-repo/semantics/openAccess
dc.subject	Espectroscòpia de raigs X
dc.subject	Fotoelectrons
dc.subject	Espectroscòpia d'electrons
dc.subject	Materials magnètics
dc.subject	Photoelectrons
dc.subject	Electron spectroscopy
dc.subject	Magnetic materials
dc.title	Quantitative x-ray photoelectron spectroscopy study of Al/AlOx bilayers
dc.type	info:eu-repo/semantics/article
dc.type	info:eu-repo/semantics/publishedVersion
dc.description.abstract	An x-ray photoelectron spectroscopy (XPS) analysis of Nb/Al wedge bilayers, oxidized by both plasma and natural oxidation, is reported. The main goal is to show that the oxidation state¿i.e., O:(oxidize)Al ratio¿, structure and thickness of the surface oxide layer, as well as the thickness of the metallic Al leftover, as functions of the oxidation procedure, can be quantitatively evaluated from the XPS spectra. This is relevant to the detailed characterization of the insulating barriers in (magnetic) tunnel junctions

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