2026-04-17T08:14:31Zhttps://recercat.cat/oai/requestoai:recercat.cat:2445/2204292025-12-05T14:46:21Zcom_2072_1057col_2072_478821col_2072_478917
RECERCAT
author
Bian, Subiao
author
Xu, Xipeng
author
Cui, Changcai
author
Arteaga Barriel, Oriol
2025-04-11T13:30:00Z2025-04-11T13:30:00Z20222025-04-11T13:30:00Z
Fresnel rhombs are the most achromatic form of retarders available and they are suitable compensating elements for spectroscopic Mueller matrix ellipsometers. However, the small stress in the rhomb caused by the mount or produced during the fabrication can affect the ellipsometry measurements with non-negligible systematic errors, due to the relatively long path length of light inside the rhomb. This work describes a calibration method that considers the non-ideal response of the Fresnel rhomb, and that it is especially well suited for calibrating Mueller matrix ellipsometers. The method describes each rhomb as the most general form
of an elliptical retarder with a small ellipticity, instead of simply assuming that they behave as linear retarders.After this calibration, we show that the systematic errors of measurements are significantly decreased.
cc-by-nc-nd (c) Elsevier B.V., 2022 http://creativecommons.org/licenses/by-nc-nd/4.0/ info:eu-repo/semantics/openAccess
El·lipsometria
Operadors el·líptics
Interferometria
Ellipsometry
Elliptic operator
Interferometry
Calibration of achromatic Fresnel rhombs with an elliptical retarder model in Mueller matrix ellipsometers
info:eu-repo/semantics/article info:eu-repo/semantics/acceptedVersion