2026-04-17T00:38:33Zhttps://recercat.cat/oai/request

oai:recercat.cat:2117/4045152026-03-09T03:49:10Zcom_2072_1033col_2072_452950

00925njm 22002777a 4500 dc Masmitjà Rusiñol, Gerard author Estarlich Gil, Pau author López Rodríguez, Gema author Martín García, Isidro author Voz Sánchez, Cristóbal author Placidi, Marcel Jose author Torrens Dinarès, Arnau author Saucedo Silva, Edgardo Ademar author Vasquez, Pia author Muñoz, Delfina author Puigdollers i González, Joaquim author Ortega Villasclaras, Pablo Rafael author 2024-03-01 This work highlights the impact of growth temperature on electrical and optical properties of Al-doped ZnO (AZO) films deposited by atomic layer deposition (ALD) technique. The ALD process and super-cycle sequence have been optimized, identifying their influence on film resistivity. By using this optimum ALD procedure, the optical and electrical properties of AZO films have been widely analyzed considering the deposition temperature. Results show promising values with film resistivity in the range of 1 m¿cm and average optical absorption below 2% for 50 nm thick AZO layers. Hall effect, X-ray diffraction and ellipsometry measurements point out that these excellent values are related to their high carrier concentration and mobility, crystalline phase and optical band gap resulting in ALD AZO films with very good properties to be applied in photovoltaic devices as transparent conductive oxide electrode This work has been supported by the Spanish government under projects PID2019-109215RB-C41 (SCALED), PID2020-115719RB-C21 (GETPV), TED2021-131778B–C22 (TROPIC) and TED2021-129758B–C32 (TransEl) funded by MCIN/AEI/10.13039/501100011033. TROPIC and TransEl projects have also support from the European Union “NextGenerationEU”/PRTR program. This work has been developing under the FOTOCER project's guidelines, which is partially funded by CDTI and MICIN Spanish government through the European Union NextGeneration/PRTR program. G. M. acknowledges financial support of the Grant – UPC Margarita Salas 2021, of the Spanish Ministry of Universities and the European Unión – NextGenerationEU. The authors wish to express their thanks to Ivan Caño for his help about XRD measurements included in the supplementary information and carried out at the Centre de Recerca en Ciència i Enginyeria Multiescala de Barcelona (CRCEMB). Postprint (author's final draft) Àrees temàtiques de la UPC::Enginyeria dels materials Zinc oxide----Optical properties Zinc oxide----Electric properties Photovoltaic power generation Atomic layer deposition Transparent conductive oxide Aluminum doped zinc oxide Òxid de zinc----Propietats òptiques Òxid de zinc----Propietats elèctriques Energia fotovoltaica--Generació Impact of atomic layer deposition temperature on electrical and optical properties of ZnO:Al films