2026-04-17T04:15:58Zhttps://recercat.cat/oai/request

oai:recercat.cat:2072/4018242024-11-25T23:00:09Zcom_2072_98col_2072_378192

urn:hdl:2072/401824 Predictive model for scanned probe oxidation kinetics Dagata, J. A. Pérez Murano, Francesc Abadal Berini, Gabriel Morimoto, K. Inoue, T. Itoh, J. Yokoyama, H. American Physical Society Oxidation Process monitoring and control Spatial analysis Previous descriptions of scanned probe oxidation kinetics involved implicit assumptions that one-dimensional, steady-state models apply for arbitrary values of applied voltage and pulse duration. These assumptions have led to inconsistent interpretations regarding the fundamental processes that contribute to control of oxide growth rate. We propose a model that includes a temporal crossover of the system from transient to steady-state growth and a spatial crossover from predominantly vertical to coupled lateral growth. The model provides an excellent fit of available experimental data. 2000 Article Applied physics letters ; Vol. 76, Issue 19 (March 2000), p. 2710-2712 open access Aquest material està protegit per drets d'autor i/o drets afins. Podeu utilitzar aquest material en funció del que permet la legislació de drets d'autor i drets afins d'aplicació al vostre cas. Per a d'altres usos heu d'obtenir permís del(s) titular(s) de drets. https://rightsstatements.org/vocab/InC/1.0/