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dc.contributor | Universitat de Barcelona |
---|---|
dc.contributor.author | Sabaté Vizcarra, Neus |
dc.contributor.author | Vogel, Dietmar |
dc.contributor.author | Gollhardt, Astrid |
dc.contributor.author | Keller, Jürgen |
dc.contributor.author | Cané i Ballart, Carles |
dc.contributor.author | Gràcia Tortadés, Isabel |
dc.contributor.author | Morante i Lleonart, Joan Ramon |
dc.contributor.author | Michel, Bernd |
dc.date | 2009-06-19T08:15:40Z |
dc.date | 2009-06-19T08:15:40Z |
dc.date | 2007 |
dc.identifier.citation | 1057-7157 |
dc.identifier.citation | 554833 |
dc.identifier.uri | http://hdl.handle.net/2445/8759 |
dc.format | 8 p. |
dc.format | application/pdf |
dc.language.iso | eng |
dc.publisher | IEEE |
dc.relation | Reproducció del document publicat a http://dx.doi.org/10.1109/JMEMS.2006.879701 |
dc.relation | Journal of Microelectromechanical Systems, 2007, vol. 16, núm. 2, p. 365-372. |
dc.relation | http://dx.doi.org/10.1109/JMEMS.2006.879701 |
dc.rights | (c) IEEE, 2007 |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Sistemes microelectromecànics |
dc.subject | Assaigs de materials |
dc.subject | Focused ion beam technology |
dc.subject | Internal stresses |
dc.subject | Materials testing |
dc.subject | Micromechanical devices |
dc.subject | Stress measurement |
dc.title | Residual Stress Measurement on a MEMS Structure With High-Spatial Resolution |
dc.type | info:eu-repo/semantics/article |
dc.type | info:eu-repo/semantics/publishedVersion |
dc.description.abstract |