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Compact device for CO2 optical sensign using macroporous silicon photonic crystals
Vega, Didac; Rodríguez Martínez, Ángel; Calavia, Raül; Vilanova, Xavier; Todorov Trifonov, Trifon
Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
A photonic crystal based on a macroporous silicon structure has been fabricated and successfully used for the detection of carbon dioxide. In this paper, the device and the measurement results are presented. The sensing device here described uses an optical approach to the detection of the gas. The use of a photonic crystal allows creating a compact device working in the medium infrared spectral range. A 700 nm square lattice macroporous structure was fabricated by electrochemical etching, creating a photonic gap centered at the 4.2 µm, a CO2 absorption line. The obtained results rely only on the absorption spectra measurement.
Peer Reviewed
Àrees temàtiques de la UPC::Enginyeria electrònica::Instrumentació i mesura::Sensors i actuadors
Optical detectors
Porous silicon
Chemical sensors
Electrochemical etching
Gas sensors
Macroporous silicon
Detectors òptics
Silici porós
http://creativecommons.org/licenses/by-nc-nd/3.0/es/
info:eu-repo/semantics/publishedVersion
info:eu-repo/semantics/conferenceObject
Institute of Electrical and Electronics Engineers (IEEE)
         

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