A Second-order delta-sigma control of dielectric charge for contactless capacitive MEMS

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dc.contributor	Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.contributor	Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
dc.contributor.author	Gorreta Mariné, Sergio
dc.contributor.author	Pons Nin, Joan
dc.contributor.author	Blokhina, Elena
dc.contributor.author	Domínguez Pumar, Manuel
dc.date	2015-04-01
dc.identifier.citation	Gorreta, S. [et al.]. A Second-order delta-sigma control of dielectric charge for contactless capacitive MEMS. "Journal of microelectromechanical systems", 01 Abril 2015, vol. 24, núm. 2, p. 259-261.
dc.identifier.citation	1057-7157
dc.identifier.citation	10.1109/JMEMS.2015.2402394
dc.identifier.uri	http://hdl.handle.net/2117/27857
dc.language.iso	eng
dc.rights	Attribution-NonCommercial-NoDerivs 3.0 Spain
dc.rights	info:eu-repo/semantics/openAccess
dc.rights	http://creativecommons.org/licenses/by-nc-nd/3.0/es/
dc.subject	Àrees temàtiques de la UPC::Enginyeria electrònica
dc.subject	Microelectromechanical systems.
dc.subject	Dielectric charging control
dc.subject	MEMS reliability
dc.subject	Sistemes microelectromecànics
dc.title	A Second-order delta-sigma control of dielectric charge for contactless capacitive MEMS
dc.type	info:eu-repo/semantics/publishedVersion
dc.type	info:eu-repo/semantics/article
dc.description.abstract	This letter introduces a new second-order delta-sigma method for controlling the dielectric charge in contactless capacitive microelectromechanical systems. This method improves the one previously proposed by the authors, providing second-order quantization noise shaping and avoiding the plateaus typical of first-order strategies. The feasibility and the features of the new method are demonstrated both experimentally and through simulations.

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