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Macroporous silicon for spectroscopic CO2 detection
Vega, Didac; Marti Alcaire, Ferran; Rodríguez Martínez, Ángel; Todorov Trifonov, Trifon
Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
A carbon dioxide sensor based on a photonic crystal of macroporous silicon and measurements of its response are presented in this paper. Photonic crystals have opened new ways for the miniaturization of optical detector devices. In particular, macroporous silicon has proven to be a versatile material for many applications, and more specifically for the creation of photonic crystals in the MIR and NIR spectral regions. In this paper we present the design and fabrication of a MpSi photonic crystal with a photonic stopband in the lambda 4.2 µm region. This bandgap creates a spectral reflection peak centred on one of the main absorption bands for carbon dioxide which can be used to detect the presence of this gas. The device structure is a square lattice of modulated pores with a 700 nm pitch produced by electrochemical etching of silicon. No sensing materials such as polymers are used to perform detection, relying just on the spectral response of as-etched MpSi.
Peer Reviewed
Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Telecomunicació òptica::Fotònica
Àrees temàtiques de la UPC::Enginyeria electrònica::Instrumentació i mesura::Sensors i actuadors
Photonic crystals
Optical detectors
Macroporous silicon
Electrochemical etching
Gas sensing
Cristalls fotònics
Detectors òptics
Attribution-NonCommercial-NoDerivs 3.0 Spain
Institute of Electrical and Electronics Engineers (IEEE)

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