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Analytical energy model for the dynamic behavior of RF MEMS switches under increased actuation voltage
Casals Terré, Jasmina; Llamas, Marco Antonio; Girbau Sala, David; Pradell i Cara, Lluís; Lázaro Guillén, Antonio; Giacomozzi, Flavio; Colpo, Sabrina
Universitat Politècnica de Catalunya. Departament d'Enginyeria Mecànica; Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions; Universitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones
In this paper, the dynamic behavior of electrostatically actuated radio frequency-microelectromechanical system (RF-MEMS) switches is analyzed using energy considerations. An analytical model for bridge-type RF-MEMS switches is proposed and the time evolution of the system total energy is calculated numerically. Switch actuation, release times, and damped release response are derived from energy analysis with focus on the effect of increasing the actuation voltage on the RF-MEMS dynamic behavior. The dynamic and RF characteristics of different RF-MEMS ohmic-contact switches have been measured using an experimental set-up based on microwave instrumentation. The measured results show a good agreement with simulations, thus validating the proposed analytical model. It is shown (theoretically and experimentally) that the damped release response increases the effective time to reach the RF/microwave OFF-state switch isolation (up to three natural periods of the mechanical system).
Peer Reviewed
Àrees temàtiques de la UPC::Enginyeria mecànica
Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica
Microelectromechanical systems
RF-microelectromechanical (RF-MEMS) switches
MEMS dynamics
nonlinear MEMS
Pull-in
Electrostatic actuators
Sistemes microelectromecànics
info:eu-repo/semantics/publishedVersion
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