Title:
|
Analytical energy model for the dynamic behavior of RF MEMS switches under increased actuation voltage
|
Author:
|
Casals Terré, Jasmina; Llamas, Marco Antonio; Girbau Sala, David; Pradell i Cara, Lluís; Lázaro Guillén, Antonio; Giacomozzi, Flavio; Colpo, Sabrina
|
Other authors:
|
Universitat Politècnica de Catalunya. Departament d'Enginyeria Mecànica; Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions; Universitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones |
Abstract:
|
In this paper, the dynamic behavior of electrostatically actuated radio frequency-microelectromechanical system (RF-MEMS) switches is analyzed using energy considerations. An analytical model for bridge-type RF-MEMS switches is proposed and the time evolution of the system total energy is calculated numerically. Switch actuation, release times, and damped release response are derived from energy analysis with focus on the effect of increasing the actuation voltage on the RF-MEMS dynamic behavior. The dynamic and RF characteristics of different RF-MEMS ohmic-contact switches have been measured using an experimental set-up based on microwave instrumentation. The measured results show a good agreement with simulations, thus validating the proposed analytical model. It is shown (theoretically and experimentally) that the damped release response increases the effective time to reach the RF/microwave OFF-state switch isolation (up to three natural periods of the mechanical system). |
Abstract:
|
Peer Reviewed |
Subject(s):
|
-Àrees temàtiques de la UPC::Enginyeria mecànica -Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica -Microelectromechanical systems -RF-microelectromechanical (RF-MEMS) switches -MEMS dynamics -nonlinear MEMS -Pull-in -Electrostatic actuators -Sistemes microelectromecànics |
Rights:
|
|
Document type:
|
Article - Published version Article |
Share:
|
|