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Real-time characterization of dielectric charging in contactless capacitive MEMS
Domínguez Pumar, Manuel; Gorreta Mariné, Sergio; Pons Nin, Joan; Blokhina, Elena; Giounanlis, Panonios; Feely, Orla
Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
This paper presents a new method to characterize the dynamics of the charge trapped in the dielectric layer of contactless microelectromechanical systems. For sampled-time systems, this allows knowing the state of the net charge at each sampling time without distorting the measurement. This approach allows one to model the expected behaviour of dielectric charging as a response to a sigma-delta control of charge. The goodness of the proposed approach is obtained by matching the experimentally obtained closed loop response with the one predicted using the proposed characterization method. The characterization method also provides a criterion to avoid nonlinear effects, such as fractal-like behaviour, in charge control.
Peer Reviewed
Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica
Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Processament del senyal::Adquisició i detecció del senyal
Nanoelectronics
MEMS reliability
Dielectric charge dynamics
Dielectric charge characterization
Dielectric charge control
SWITCHES
Nanoelectrònica
info:eu-repo/semantics/submittedVersion
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