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dc.contributor | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
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dc.contributor | Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
dc.contributor.author | López Martí, Gema |
dc.contributor.author | Ortega Villasclaras, Pablo Rafael |
dc.contributor.author | Voz Sánchez, Cristóbal |
dc.contributor.author | Martín García, Isidro |
dc.contributor.author | Colina Brito, Mónica Alejandra |
dc.contributor.author | Morales Vilches, Ana Belén |
dc.contributor.author | Orpella García, Alberto |
dc.contributor.author | Alcubilla González, Ramón |
dc.date | 2013 |
dc.identifier.citation | López, G. [et al.]. Surface passivation and optical characterization of Al2O3/a-SiCx stacks on c-Si substrates. A: E-MRS Spring Meeting. "E-MRS 2013 Spring Meeting. Congres Center - Strasbourg, France May 27th - 31st, 2013". Strasbourg: 2013, p. 1. |
dc.identifier.uri | http://hdl.handle.net/2117/26822 |
dc.language.iso | eng |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica |
dc.subject | Nanoelectronics |
dc.subject | Nanoelectrònica |
dc.title | Surface passivation and optical characterization of Al2O3/a-SiCx stacks on c-Si substrates |
dc.type | info:eu-repo/semantics/publishedVersion |
dc.type | info:eu-repo/semantics/other |