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dc.contributor | Universitat de Barcelona |
---|---|
dc.contributor.author | Frigeri, Paolo Antonio |
dc.contributor.author | Nos Aguilà, Oriol |
dc.contributor.author | Bertomeu i Balagueró, Joan |
dc.date | 2015-01-27T09:24:59Z |
dc.date | 2015-01-27T09:24:59Z |
dc.date | 2015 |
dc.date | 2015-01-27T09:24:59Z |
dc.identifier.citation | 0040-6090 |
dc.identifier.citation | 643701 |
dc.identifier.uri | http://hdl.handle.net/2445/61851 |
dc.format | 18 p. |
dc.format | application/pdf |
dc.language.iso | eng |
dc.publisher | Elsevier B.V. |
dc.relation | Versió postprint del document publicat a: http://dx.doi.org/10.1016/j.tsf.2014.10.011 |
dc.relation | Thin Solid Films, 2015, vol. 575, p. 34-37 |
dc.relation | http://dx.doi.org/10.1016/j.tsf.2014.10.011 |
dc.rights | (c) Elsevier B.V., 2015 |
dc.rights | info:eu-repo/semantics/openAccess |
dc.subject | Tungstè |
dc.subject | Deposició química en fase vapor |
dc.subject | Silici |
dc.subject | Catàlisi |
dc.subject | Pel·lícules fines |
dc.subject | Tungsten |
dc.subject | Chemical vapor deposition |
dc.subject | Silicon |
dc.subject | Catalysis |
dc.subject | Thin films |
dc.title | Degradation of thin tungsten filaments at high temperature in HWCVD |
dc.type | info:eu-repo/semantics/article |
dc.type | info:eu-repo/semantics/acceptedVersion |
dc.description.abstract |