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Modelling of a charge control method for capacitive MEMS
Giounanlis, Panonios; Blokhina, Elena; Feely, Orla; Domínguez Pumar, Manuel; Pons Nin, Joan; Gorreta Mariné, Sergio
Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica; Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica::Circuits integrats
Integrated circuits
Micromechanics
MEMS control
Dielectric charging
MEMS reliability
Circuits integrats
Micromecànica
Attribution-NonCommercial-NoDerivs 3.0 Spain
http://creativecommons.org/licenses/by-nc-nd/3.0/es/
info:eu-repo/semantics/publishedVersion
info:eu-repo/semantics/conferenceObject
Institute of Electrical and Electronics Engineers (IEEE)
         

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