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| dc.contributor | Universitat Politècnica de Catalunya. Departament d'Organització d'Empreses |
|---|---|
| dc.contributor.author | Cané, Carles |
| dc.contributor.author | Götz, A. |
| dc.contributor.author | Merlos, A. |
| dc.contributor.author | Gràcia, I. |
| dc.contributor.author | Errachid, Abdelhamid |
| dc.contributor.author | Losantos Viñolas, Pedro |
| dc.contributor.author | Lora-Tamayo, E. |
| dc.date | 1996-09-01 |
| dc.identifier.citation | Cané, C. [et al.]. Multilayer ISFET membranes for microsystems applications. "Sensors and actuators B. Chemical", 01 Setembre 1996, vol. 1-3, núm. 136-140, p. 35-36. |
| dc.identifier.citation | 0925-4005 |
| dc.identifier.citation | 10.1016/S0925-4005(97)80043-3 |
| dc.identifier.uri | http://hdl.handle.net/2117/21007 |
| dc.description.abstract | The fabrication of microsystems in which chemical measurements play a role make the on-chip combination of chemical sensors and signal processing circuitry highly desirable. Chemical sensors use sensitive layers which are not a part of MOS devices and in this sense, the determination of the best sensors and technological processes to achieve good integrated smart sensors is very important. In this paper a study of compatibility of ISFET chemical sensors and CMOS circuitry is presented for application to biomedical microsystems. |
| dc.language.iso | eng |
| dc.relation | http://www.sciencedirect.com/science/article/pii/S0925400597800433 |
| dc.rights | Attribution-NonCommercial-NoDerivs 3.0 Spain |
| dc.rights | info:eu-repo/semantics/openAccess |
| dc.rights | http://creativecommons.org/licenses/by-nc-nd/3.0/es/ |
| dc.subject | Àrees temàtiques de la UPC::Economia i organització d'empreses |
| dc.subject | Chemical detectors |
| dc.subject | Integrated circuits |
| dc.subject | Multilayer ISFET membranes |
| dc.subject | Microsystem application |
| dc.subject | Sensors químics |
| dc.subject | Circuits integrats |
| dc.title | Multilayer ISFET membranes for microsystems applications |
| dc.type | info:eu-repo/semantics/publishedVersion |
| dc.type | info:eu-repo/semantics/article |
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